Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11980998 | Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid | Itsuki Kobata, Takashi Yamazaki, Tadakazu Sone | 2024-05-14 |
| 11839948 | Polishing apparatus | Takashi Yamazaki, Itsuki Kobata, Tadakazu Sone | 2023-12-12 |
| 11433502 | Polishing table and polishing apparatus having ihe same | Kenichiro Saito | 2022-09-06 |
| 10926374 | Substrate processing apparatus | Hiroyuki Shinozaki, Shuichi Kamata, Koichi Takeda | 2021-02-23 |
| 10816259 | Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method | Kenichi Suzuki, Kenichiro Saito | 2020-10-27 |
| 10661411 | Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface | Hiroshi Sotozaki, Takeshi Kodera, Ryo Hasegawa | 2020-05-26 |
| 10157762 | Substrate processing apparatus and substrate presence or absence checking method and program | Tomohiro Tanaka, Kenichiro Saito, Koichi Takeda, Masumi Nishijima | 2018-12-18 |
| 9764446 | Rotary joint and polishing apparatus | Hideo Aizawa, Tadakazu Sone, Masao Umemoto | 2017-09-19 |
| 9530704 | Polishing apparatus and wear detection method | Tadakazu Sone | 2016-12-27 |
| 9522453 | Polishing apparatus | Hideo Aizawa, Masao Umemoto, Tadakazu Sone | 2016-12-20 |
| 9434044 | Polishing apparatus | Hiroshi Sotozaki, Takahiro Kawano, Akihiro Mochida | 2016-09-06 |
| 9409277 | Polishing apparatus and polishing method | Masao Umemoto, Tadakazu Sone, Hideo Aizawa, Masaaki Eriguchi | 2016-08-09 |
| 9174324 | Polishing apparatus with polishing head cover | Masao Umemoto, Tadakazu Sone, Hideo Aizawa | 2015-11-03 |
| 9144878 | Polishing apparatus and wear detection method | Tadakazu Sone | 2015-09-29 |
| 9028297 | Polishing apparatus | Tadakazu Sone | 2015-05-12 |
| 8382558 | Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method | Katsuhide Watanabe, Soichi Isobe | 2013-02-26 |
| 8298369 | Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid | Koji Maeda, Hiroshi Shimomoto, Soichi Isobe, Toru Niwa | 2012-10-30 |
| 7850817 | Polishing device and substrate processing device | Satoshi Wakabayashi, Tetsuji Togawa, Koji Ato, Hiroshi Sotozaki | 2010-12-14 |
| 7837534 | Apparatus for heating or cooling a polishing surface of a polishing apparatus | Shunichi Aiyoshizawa, Ryo Kato, Yu Ishii | 2010-11-23 |