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Takashi Yamazaki, Itsuki Kobata, Tadakazu Sone |
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Kenichi Suzuki, Kenichiro Saito |
2020-10-27 |
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Hiroshi Sotozaki, Takeshi Kodera, Ryo Hasegawa |
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Substrate processing apparatus and substrate presence or absence checking method and program |
Tomohiro Tanaka, Kenichiro Saito, Koichi Takeda, Masumi Nishijima |
2018-12-18 |
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Rotary joint and polishing apparatus |
Hideo Aizawa, Tadakazu Sone, Masao Umemoto |
2017-09-19 |
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Polishing apparatus and wear detection method |
Tadakazu Sone |
2016-12-27 |
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Polishing apparatus |
Hideo Aizawa, Masao Umemoto, Tadakazu Sone |
2016-12-20 |
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Polishing apparatus |
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2016-09-06 |
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2016-08-09 |
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Polishing apparatus with polishing head cover |
Masao Umemoto, Tadakazu Sone, Hideo Aizawa |
2015-11-03 |
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Polishing apparatus and wear detection method |
Tadakazu Sone |
2015-09-29 |
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| 8382558 |
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Katsuhide Watanabe, Soichi Isobe |
2013-02-26 |
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2010-11-23 |