Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Tsuneo Torikoshi, Kunio Oishi, Katsuhide Watanabe, Hozumi Yasuda | 2024-07-16 |
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Hirotaka Satori, Makoto Kashiwagi, Manato Furusawa | 2023-07-18 |
| 11618123 | Polishing method and polishing apparatus | Tetsuji Togawa, Atsushi Yoshida | 2023-04-04 |
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Makoto Kashiwagi, Atsushi Yoshida, Kenichi Kobayashi, Tetsuji Togawa +1 more | 2022-11-29 |
| 11446784 | Chemical mechanical polishing apparatus for polishing workpiece | Kenya Ito, Hitoshi Morinaga, Kazusei Tamai, Shingo OHTSUKI, Hiroshi Asano | 2022-09-20 |
| 11436392 | Substrate processing apparatus and storage medium having program stored therein | Keisuke Uchiyama, Kunio Oishi, Hiroyuki Takenaka | 2022-09-06 |
| 11192147 | Substrate processing apparatus and substrate processing method | Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito | 2021-12-07 |
| 11180853 | Substrate processing apparatus and substrate processing method | Fong-Jie Du, Makoto Kashiwagi | 2021-11-23 |
| 11139160 | Apparatus and method for processing a surface of a substrate | Keisuke Uchiyama | 2021-10-05 |
| 10926376 | Method and apparatus for polishing a substrate, and method for processing a substrate | Masayuki Nakanishi, Kenya Ito, Keisuke Uchiyama, Makoto Kashiwagi | 2021-02-23 |
| 10854473 | Polishing method, polishing apparatus, and substrate processing system | Kenya Ito, Keisuke Uchiyama, Masayuki Nakanishi | 2020-12-01 |
| 10799917 | Substrate processing apparatus and substrate processing method | Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera, Hiroshi Tomita +1 more | 2020-10-13 |
| 10651057 | Apparatus and method for cleaning a back surface of a substrate | Kenichi Kobayashi, Keisuke Uchiyama | 2020-05-12 |
| 10458020 | Substrate processing apparatus and substrate processing method | Fong-Jie Du, Makoto Kashiwagi | 2019-10-29 |
| 10376929 | Apparatus and method for polishing a surface of a substrate | Masayuki Nakanishi, Keisuke Uchiyama | 2019-08-13 |
| 10328465 | Substrate processing apparatus and substrate processing method | Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera, Hiroshi Tomita +1 more | 2019-06-25 |
| D845568 | Pad holder for polishing apparatus | Kenya Ito, Hirohiko Ueda | 2019-04-09 |
| 10016875 | Abrasive film fabrication method and abrasive film | Hiroyuki Kawasaki, Masayuki Nakanishi, Kenya Ito | 2018-07-10 |
| 9821429 | Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus | Kenya Ito, Shozo TAKAHASHI, Mika Suzuki | 2017-11-21 |
| 9808836 | Substrate processing apparatus | Tetsuji Togawa, Kenya Ito, Keisuke Uchiyama | 2017-11-07 |
| 9808903 | Method of polishing back surface of substrate and substrate processing apparatus | Kenya Ito, Masayuki Nakanishi, Tetsuji Togawa | 2017-11-07 |
| 9566616 | Substrate processing apparatus | Tetsuji Togawa, Kenya Ito, Keisuke Uchiyama | 2017-02-14 |
| D777546 | Work holder for polishing apparatus | Kenya Ito, Hirohiko Ueda | 2017-01-31 |
| 9492910 | Polishing method | Hiroyuki Kawasaki, Masayuki Nakanishi, Kenya Ito, Kenji Kodera, Michiyoshi YAMASHITA | 2016-11-15 |
| 9393595 | Abrasive film fabrication method and abrasive film | Hiroyuki Kawasaki, Masayuki Nakanishi, Kenya Ito | 2016-07-19 |