Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Kunio Oishi, Katsuhide Watanabe, Hozumi Yasuda, Yu Ishii | 2024-07-16 |
| 11897078 | Polishing apparatus, information processing system, polishing method, and computer-readable storage medium | Akira Nakamura, Yuta Suzuki, Hisanori Matsuo, Takahito Kagoshima | 2024-02-13 |
| 10559277 | Non-transitory computer-readable storage medium storing a program of screen control and semiconductor manufacturing apparatus | Takamasa Nakamura | 2020-02-11 |
| 10478938 | Polishing method and apparatus | — | 2019-11-19 |
| D864978 | Display screen with animated graphic user interface | Takamasa Nakamura | 2019-10-29 |
| D854564 | Display screen with graphical user interface | Takamasa Nakamura | 2019-07-23 |
| D852206 | Display screen with animated graphical user interface | Takamasa Nakamura | 2019-06-25 |
| 9847263 | Substrate processing method including reprocessing rejected wafers | HIROFUMI OTAKI | 2017-12-19 |
| 9610673 | Polishing method and apparatus | — | 2017-04-04 |
| 9524913 | Polishing method and polishing apparatus | HIROFUMI OTAKI | 2016-12-20 |
| 8592313 | Polishing method and polishing apparatus | Kuniaki Yamaguchi | 2013-11-26 |
| 8332064 | Polishing method and polishing apparatus, and program for controlling polishing apparatus | Kuniaki Yamaguchi | 2012-12-11 |
| 8165710 | Polishing method, polishing apparatus, and program for controlling polishing apparatus | Mitsunori Sugiyama | 2012-04-24 |
| 7989348 | Polishing method and polishing apparatus | Kuniaki Yamaguchi | 2011-08-02 |
| 7720562 | Polishing method and polishing apparatus | — | 2010-05-18 |