Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179312 | Apparatus for polishing, processing system, and method of polishing | Takuya MORIURA, Hiroshi Sotozaki, Tadakazu Sone, Masayoshi Ito, Itsuki Kobata +1 more | 2024-12-31 |
| 11926018 | Apparatus for polishing and method of polishing | Masayoshi Ito, Itsuki Kobata, Takuya MORIURA | 2024-03-12 |
| 11897078 | Polishing apparatus, information processing system, polishing method, and computer-readable storage medium | Akira Nakamura, Tsuneo Torikoshi, Yuta Suzuki, Takahito Kagoshima | 2024-02-13 |
| 11897080 | Polishing apparatus | Masashi KABASAWA, Yasuyuki Motoshima, Keisuke Kamiki | 2024-02-13 |
| 10710208 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2020-07-14 |
| 10478936 | Method and apparatus for measuring surface properties of polishing pad | Yoshihiro Mochizuki, Keisuke Suzuki, Takahiro Tajiri, Panart Khajornrungruang | 2019-11-19 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Yasuyuki Motoshima, Yohei Eto, Mitsunori Komatsu | 2019-09-17 |
| 10401285 | Apparatus for measuring surface properties of polishing pad | Keiichi Kimura, Keisuke Suzuki, Panart Khajornrungruang, Takashi Kushida | 2019-09-03 |
| 10369675 | CMP apparatus having polishing pad surface property measuring device | — | 2019-08-06 |
| 10259098 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Toru Maruyama | 2019-04-16 |
| 10195712 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2019-02-05 |
| 10035238 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2018-07-31 |
| 9969046 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Toru Maruyama | 2018-05-15 |
| 9782870 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2017-10-10 |
| 9669515 | Polishing apparatus | Yoshihiro Mochizuki, Keisuke Suzuki, Takahiro Tajiri, Souichirou Ichioka | 2017-06-06 |
| 9579768 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Toru Maruyama | 2017-02-28 |
| 9393670 | Measuring method of surface roughness of polishing pad | — | 2016-07-19 |
| 9242339 | Polishing apparatus and polishing method | Yoshihiro Mochizuki, Chikako TAKATOH, Tadashi OBO | 2016-01-26 |
| 9156130 | Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus | Takahiro SHIMANO, Mutsumi Tanikawa, Kuniaki Yamaguchi, Katsuhide Watanabe | 2015-10-13 |
| 9108292 | Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus | Takahiro SHIMANO, Mutsumi Tanikawa, Kuniaki Yamaguchi, Katsuhide Watanabe | 2015-08-18 |
| 9067296 | Polishing method | Katsutoshi Ono, Yu Ishii, Kuniaki Yamaguchi | 2015-06-30 |
| 8932883 | Method of measuring surface properties of polishing pad | Keiichi Kimura, Keisuke Suzuki, Panart Khajornrungruang, Takashi Kushida | 2015-01-13 |
| 8360817 | Polishing apparatus and polishing method | Yu Ishii, Yoichi Shiokawa, Jyoji Heianna | 2013-01-29 |
| 8241426 | CMP polishing method, CMP polishing apparatus, and process for producing semiconductor device | Syozo Takada, Akira Ishikawa | 2012-08-14 |
| 7207864 | Polishing apparatus | Kenji Kamimura, Norio Kimura, Satoshi Okamura, Hideo Aizawa, Makoto Akagi +2 more | 2007-04-24 |