Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478936 | Method and apparatus for measuring surface properties of polishing pad | Hisanori Matsuo, Yoshihiro Mochizuki, Keisuke Suzuki, Takahiro Tajiri | 2019-11-19 |
| 10401285 | Apparatus for measuring surface properties of polishing pad | Hisanori Matsuo, Keiichi Kimura, Keisuke Suzuki, Takashi Kushida | 2019-09-03 |
| 8932883 | Method of measuring surface properties of polishing pad | Hisanori Matsuo, Keiichi Kimura, Keisuke Suzuki, Takashi Kushida | 2015-01-13 |
| 8755055 | System and method for measuring length of gap between rotating tool and workpiece | Keiichi Kimura | 2014-06-17 |