Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358028 | Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method | Megumi Uno, Akira Fukunaga, Yumiko Nakamura | 2025-07-15 |
| 12251738 | Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool | Megumi Uno, Akira Fukunaga, Yumiko Nakamura | 2025-03-18 |
| 12101073 | Method for determining a cleanliness of a cleaning member | Megumi Uno, Masahito Abe, Toshiya Kon, Yumiko Nakamura, Shohei Shima | 2024-09-24 |
| 9242339 | Polishing apparatus and polishing method | Hisanori Matsuo, Yoshihiro Mochizuki, Tadashi OBO | 2016-01-26 |