MU

Megumi Uno

EB Ebara: 3 patents #598 of 1,611Top 40%
Overall (All Time): #1,322,281 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12358028 Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method Akira Fukunaga, Chikako TAKATOH, Yumiko Nakamura 2025-07-15
12251738 Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool Akira Fukunaga, Chikako TAKATOH, Yumiko Nakamura 2025-03-18
12101073 Method for determining a cleanliness of a cleaning member Chikako TAKATOH, Masahito Abe, Toshiya Kon, Yumiko Nakamura, Shohei Shima 2024-09-24