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Method for determining a cleanliness of a cleaning member |
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Heteroaromatic methyl cyclic amine derivative |
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Trap apparatus |
Kuniaki Horie, Tsutomu Nakada, Yuji Araki |
2002-12-03 |
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Apparatus and method for processing substrate |
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2002-05-14 |
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Chemical vapor deposition apparatus and cleaning method thereof |
Hidenao Suzuki, Tsutomu Nakada, Masao Saitoh |
2001-11-06 |
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Liquid feed vaporization system and gas injection device |
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2001-08-28 |
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Liquid feed vaporization system and gas injection device |
Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Fumio Kuriyama, Takeshi Murakami +2 more |
2001-07-31 |
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Liquid feed vaporization system and gas injection device |
Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Fumio Kuriyama, Takeshi Murakami +2 more |
2001-02-27 |
| 6132512 |
Vapor-phase film growth apparatus and gas ejection head |
Kuniaki Horie, Tsutomu Nakada, Takeshi Murakami, Hidenao Suzuki, Yuji Araki |
2000-10-17 |
| 5950646 |
Vapor feed supply system |
Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Yukio Fukunaga +5 more |
1999-09-14 |
| 5951923 |
Vaporizer apparatus and film deposition apparatus therewith |
Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Fumio Kuriyama, Takeshi Murakami +1 more |
1999-09-14 |