Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9624596 | Electrochemical deposition method | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2017-04-18 |
| 9593430 | Electrochemical deposition method | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2017-03-14 |
| 9506162 | Electrochemical deposition method | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2016-11-29 |
| 9388505 | Electrochemical deposition method | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2016-07-12 |
| 8936705 | Electrochemical deposition apparatus | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2015-01-20 |
| 8337680 | Substrate holder and plating apparatus | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2012-12-25 |
| 7901551 | Substrate holder and plating apparatus | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2011-03-08 |
| 7601248 | Substrate holder and plating apparatus | Junichiro Yoshioka, Yugang Guo, Satoshi Morikami | 2009-10-13 |
| 6972256 | Method and apparatus for forming thin film of metal | Akira Fukunaga, Naoaki Ogure, Takao Kato, Hiroshi Nagasawa, Shinji Kajita +1 more | 2005-12-06 |
| 6921722 | Coating, modification and etching of substrate surface with particle beam irradiation of the same | Naoaki Ogure, Yuji Araki, Hiroshi Nagasaka, Momoko Kakutani, Tohru Satake | 2005-07-26 |
| 6780245 | Method and apparatus of producing thin film of metal or metal compound | Akira Fukunaga | 2004-08-24 |
| 6730596 | Method of and apparatus for forming interconnection | Akira Fukunaga, Naoaki Ogure, Takao Kato, Akihisa Hongo, Hiroshi Nagasawa | 2004-05-04 |
| 6517642 | Method and apparatus of producing thin film of metal or metal compound | Akira Fukunaga | 2003-02-11 |
| 6488774 | Trap apparatus | Masahito Abe, Tsutomu Nakada, Yuji Araki | 2002-12-03 |
| 6458694 | High energy sputtering method for forming interconnects | Naoaki Ogure, Takao Kato, Yuji Araki | 2002-10-01 |
| 6419462 | Positive displacement type liquid-delivery apparatus | Yukio Fukunaga, Akihisa Hongo, Kiwamu Tsukamoto, Kenji Kamoda, Hirotake Yamagishi +1 more | 2002-07-16 |
| 6387182 | Apparatus and method for processing substrate | Yukio Fukunaga, Naoaki Ogure, Tsutomu Nakada, Masahito Abe, Mitsunao Shibasaki +3 more | 2002-05-14 |
| 6282368 | Liquid feed vaporization system and gas injection device | Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Masahito Abe, Yuji Araki +1 more | 2001-08-28 |
| 6269221 | Liquid feed vaporization system and gas injection device | Hidenao Suzuki, Tsutomu Nakada, Fumio Kuriyama, Takeshi Murakami, Masahito Abe +2 more | 2001-07-31 |
| 6195504 | Liquid feed vaporization system and gas injection device | Hidenao Suzuki, Tsutomu Nakada, Fumio Kuriyama, Takeshi Murakami, Masahito Abe +2 more | 2001-02-27 |
| 6176929 | Thin-film deposition apparatus | Yukio Fukunaga, Hiroyuki Shinozaki, Kiwamu Tsukamoto, Mitsunao Shibasaki, Hiroyuki Ueyama +1 more | 2001-01-23 |
| 6132512 | Vapor-phase film growth apparatus and gas ejection head | Tsutomu Nakada, Takeshi Murakami, Hidenao Suzuki, Masahito Abe, Yuji Araki | 2000-10-17 |
| 6116267 | Valving device | Hidenao Suzuki, Kiwamu Tsukamoto, Yuji Araki | 2000-09-12 |
| 5950646 | Vapor feed supply system | Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Yukio Fukunaga, Masahito Abe +5 more | 1999-09-14 |
| 5951923 | Vaporizer apparatus and film deposition apparatus therewith | Hidenao Suzuki, Tsutomu Nakada, Fumio Kuriyama, Takeshi Murakami, Masahito Abe +1 more | 1999-09-14 |