| 9624596 |
Electrochemical deposition method |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2017-04-18 |
| 9593430 |
Electrochemical deposition method |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2017-03-14 |
| 9506162 |
Electrochemical deposition method |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2016-11-29 |
| 9388505 |
Electrochemical deposition method |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2016-07-12 |
| 8936705 |
Electrochemical deposition apparatus |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2015-01-20 |
| 8337680 |
Substrate holder and plating apparatus |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2012-12-25 |
| 7901551 |
Substrate holder and plating apparatus |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2011-03-08 |
| 7601248 |
Substrate holder and plating apparatus |
Junichiro Yoshioka, Kuniaki Horie, Yugang Guo |
2009-10-13 |