Issued Patents All Time
Showing 25 most recent of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9390886 | Electro-optical inspection apparatus using electron beam | Mamoru Nakasuji, Nobuharu Noji, Hirosi Sobukawa | 2016-07-12 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2016-06-14 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2015-02-03 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2014-09-02 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2014-08-12 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2014-06-03 |
| 8674317 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji | 2014-03-18 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2013-02-05 |
| 8368016 | Electron beam apparatus and a device manufacturing method by using said electron beam apparatus | Mamoru Nakasuji, Takao Kato, Nobuharu Noji, Takeshi Murakami, Kenji Watanabe | 2013-02-05 |
| 8198797 | Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor | Eiichi Iijima, Guo Hua Shen | 2012-06-12 |
| 8124933 | Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample | Kenji Watanabe, Takeshi Murakami, Masahiro Hatakeyama, Yoshinao Hirabayashi, Nobuhara Noji +2 more | 2012-02-28 |
| 8076654 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji | 2011-12-13 |
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tsutomi Karimata, Toshifumi Kimba, Matsutaro Miyamoto +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2011-02-15 |
| 7829871 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2010-11-09 |
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa +9 more | 2010-06-29 |
| 7741601 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2010-06-22 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Toshifumi Kimba, Hirosi Sobukawa, Shoji Yoshikawa +5 more | 2009-10-13 |
| 7598471 | Method of electric discharge machining a cathode for an electron gun | Muneki Hamashima, Takao Kato, Mamoru Nakasuji, Nobuharu Noji | 2009-10-06 |
| 7592586 | Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample | Kenji Watanabe, Takeshi Murakami, Masahiro Hatakeyama, Yoshinao Hirabayashi, Nobuharu Noji +2 more | 2009-09-22 |
| 7569838 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Shoji Yoshikawa, Tsutomu Karimata +7 more | 2009-08-04 |
| 7521692 | TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus | Masahiro Hatakeyama, Takeshi Murakami, Kenji Watanabe, Nobuharu Noji | 2009-04-21 |