Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11992915 | System for adjusting pad surface temperature and polishing apparatus | Shuji Uozumi, Toru Maruyama | 2024-05-28 |
| 11898940 | Leak detection system and inspection method for the system | Toru Maruyama, Keisuke Kamiki | 2024-02-13 |
| 10903101 | Substrate processing apparatus and method for detecting abnormality of substrate | Toru Maruyama, Yoshinori Isono, Hiroaki Yanagi | 2021-01-26 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Hisanori Matsuo, Yasuyuki Motoshima, Yohei Eto | 2019-09-17 |
| 10373845 | Substrate cleaning apparatus and substrate cleaning method | Fujihiko Toyomasu, Toru Maruyama | 2019-08-06 |
| 9373528 | Substrate processing apparatus | Toru Maruyama | 2016-06-21 |
| 6758728 | Method and apparatus for cleaning polishing surface of polisher | Tatsuo Inoue | 2004-07-06 |
| 6508695 | Pure water reusing system | Mutsumi Tanikawa, Kiyotaka Kawashima, Hiroshi Shimomoto, Katsuya Okumura | 2003-01-21 |
| 6443816 | Method and apparatus for cleaning polishing surface of polisher | Tatsuo Inoue | 2002-09-03 |
| 6338671 | Apparatus for supplying polishing liquid | Kiyotaka Kawashima, Mutsumi Tanikawa, Fujihiko Toyomasu | 2002-01-15 |
| 6280300 | Filter apparatus | Kiyotaka Kawashima, Mutsumi Tanikawa | 2001-08-28 |