Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12023777 | Temperature regulating apparatus and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2024-07-02 |
| 11958161 | Polishing apparatus having surface-property measuring device of polishing pad and polishing system | Toru Maruyama, Yasuyuki Motoshima | 2024-04-16 |
| 11897080 | Polishing apparatus | Masashi KABASAWA, Yasuyuki Motoshima, Hisanori Matsuo | 2024-02-13 |
| 11898940 | Leak detection system and inspection method for the system | Toru Maruyama, Mitsunori Komatsu | 2024-02-13 |
| 11839947 | Pad-temperature regulating apparatus, and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2023-12-12 |
| 11383345 | Cleaning apparatus for heat exchanger and polishing apparatus | Yasuyuki Motoshima, Toru Maruyama, Shuji Uozumi | 2022-07-12 |