Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368059 | Substrate cleaning apparatus, substrate processing apparatus, substrate cleaning method, device manufacturing method, and non-transitory computer readable medium | Kenichi Suzuki | 2025-07-22 |
| 12181345 | Method of calibrating radiation thermometer and system thereof | Yasuyuki Motoshima | 2024-12-31 |
| 11992915 | System for adjusting pad surface temperature and polishing apparatus | Toru Maruyama, Mitsunori Komatsu | 2024-05-28 |
| 11826871 | Pad-temperature regulating apparatus, pad-temperature regulating method, and polishing apparatus | Toru Maruyama | 2023-11-28 |
| 11618111 | Method of manufacturing plate-shaped solder and manufacturing device | Kazuhiko Sakutani | 2023-04-04 |
| 11517940 | Substrate cleaning device | Yasuyuki Motoshima, Toru Maruyama | 2022-12-06 |
| 11383345 | Cleaning apparatus for heat exchanger and polishing apparatus | Yasuyuki Motoshima, Toru Maruyama, Keisuke Kamiki | 2022-07-12 |
| 11213921 | Device for manufacturing plate solder and method for manufacturing plate solder | Kazuhiko Sakutani | 2022-01-04 |