Issued Patents All Time
Showing 25 most recent of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12201603 | Bicyclic compound and use thereof for medical purposes | Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani | 2025-01-21 |
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi | 2024-08-13 |
| 12023777 | Temperature regulating apparatus and polishing apparatus | Keisuke Kamiki, Yasuyuki Motoshima | 2024-07-02 |
| 11992915 | System for adjusting pad surface temperature and polishing apparatus | Shuji Uozumi, Mitsunori Komatsu | 2024-05-28 |
| 11958161 | Polishing apparatus having surface-property measuring device of polishing pad and polishing system | Keisuke Kamiki, Yasuyuki Motoshima | 2024-04-16 |
| 11919124 | Pad-temperature regulating apparatus, method of regulating pad-temperature, polishing apparatus, and polishing system | — | 2024-03-05 |
| 11919048 | Method of cleaning an optical film-thickness measuring system | Nobuyuki Takahashi, Taichi Yokoyama, Zhongxin Wen | 2024-03-05 |
| 11898940 | Leak detection system and inspection method for the system | Mitsunori Komatsu, Keisuke Kamiki | 2024-02-13 |
| 11839947 | Pad-temperature regulating apparatus, and polishing apparatus | Keisuke Kamiki, Yasuyuki Motoshima | 2023-12-12 |
| 11826871 | Pad-temperature regulating apparatus, pad-temperature regulating method, and polishing apparatus | Shuji Uozumi | 2023-11-28 |
| 11617733 | Bicyclic compound and use thereof for medical purposes | Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani | 2023-04-04 |
| 11517940 | Substrate cleaning device | Shuji Uozumi, Yasuyuki Motoshima | 2022-12-06 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi | 2022-09-20 |
| 11383345 | Cleaning apparatus for heat exchanger and polishing apparatus | Yasuyuki Motoshima, Keisuke Kamiki, Shuji Uozumi | 2022-07-12 |
| 11262105 | Cryocooler and cryocooler pipe system | — | 2022-03-01 |
| 10940134 | Bicyclic compound and use thereof for medical purposes | Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani | 2021-03-09 |
| 10903101 | Substrate processing apparatus and method for detecting abnormality of substrate | Mitsunori Komatsu, Yoshinori Isono, Hiroaki Yanagi | 2021-01-26 |
| 10792784 | Leak checking method, and computer-readable storage medium for performing the leak checking method | Suguru Sakugawa, Nobuyuki Takahashi | 2020-10-06 |
| 10710208 | Polishing method and polishing apparatus | Hisanori Matsuo, Yasuyuki Motoshima | 2020-07-14 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi | 2020-05-26 |
| 10589398 | Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program | Yohei Eto | 2020-03-17 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa, Keita Yagi +2 more | 2020-02-11 |
| 10475691 | Substrate transfer hand | Yasuyuki Motoshima, Yohei Eto | 2019-11-12 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more | 2019-10-08 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Hisanori Matsuo, Yasuyuki Motoshima, Yohei Eto, Mitsunori Komatsu | 2019-09-17 |