| 12472601 |
Method of checking leakage of fluid and polishing apparatus |
Yasuyuki Motoshima, Shuji Uozumi, Keisuke Kamiki, Mitsunori Komatsu |
2025-11-18 |
|
| 12201603 |
Bicyclic compound and use thereof for medical purposes |
Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani |
2025-01-21 |
|
| 12062563 |
Substrate processing apparatus, substrate processing system, and substrate processing method |
Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi |
2024-08-13 |
$23,564,000 |
| 12023777 |
Temperature regulating apparatus and polishing apparatus |
Keisuke Kamiki, Yasuyuki Motoshima |
2024-07-02 |
$16,876,000 |
| 11992915 |
System for adjusting pad surface temperature and polishing apparatus |
Shuji Uozumi, Mitsunori Komatsu |
2024-05-28 |
$16,652,000 |
| 11958161 |
Polishing apparatus having surface-property measuring device of polishing pad and polishing system |
Keisuke Kamiki, Yasuyuki Motoshima |
2024-04-16 |
$17,011,000 |
| 11919048 |
Method of cleaning an optical film-thickness measuring system |
Nobuyuki Takahashi, Taichi Yokoyama, Zhongxin Wen |
2024-03-05 |
$15,162,000 |
| 11919124 |
Pad-temperature regulating apparatus, method of regulating pad-temperature, polishing apparatus, and polishing system |
— |
2024-03-05 |
$15,162,000 |
| 11898940 |
Leak detection system and inspection method for the system |
Mitsunori Komatsu, Keisuke Kamiki |
2024-02-13 |
$14,886,000 |
| 11839947 |
Pad-temperature regulating apparatus, and polishing apparatus |
Keisuke Kamiki, Yasuyuki Motoshima |
2023-12-12 |
$10,723,000 |
| 11826871 |
Pad-temperature regulating apparatus, pad-temperature regulating method, and polishing apparatus |
Shuji Uozumi |
2023-11-28 |
$7,743,000 |
| 11617733 |
Bicyclic compound and use thereof for medical purposes |
Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani |
2023-04-04 |
|
| 11517940 |
Substrate cleaning device |
Shuji Uozumi, Yasuyuki Motoshima |
2022-12-06 |
$6,201,000 |
| 11450544 |
Substrate processing apparatus, substrate processing system, and substrate processing method |
Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi |
2022-09-20 |
$16,056,000 |
| 11383345 |
Cleaning apparatus for heat exchanger and polishing apparatus |
Yasuyuki Motoshima, Keisuke Kamiki, Shuji Uozumi |
2022-07-12 |
$10,906,000 |
| 11262105 |
Cryocooler and cryocooler pipe system |
— |
2022-03-01 |
|
| 10940134 |
Bicyclic compound and use thereof for medical purposes |
Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani |
2021-03-09 |
|
| 10903101 |
Substrate processing apparatus and method for detecting abnormality of substrate |
Mitsunori Komatsu, Yoshinori Isono, Hiroaki Yanagi |
2021-01-26 |
|
| 10792784 |
Leak checking method, and computer-readable storage medium for performing the leak checking method |
Suguru Sakugawa, Nobuyuki Takahashi |
2020-10-06 |
|
| 10710208 |
Polishing method and polishing apparatus |
Hisanori Matsuo, Yasuyuki Motoshima |
2020-07-14 |
|
| 10665487 |
Substrate processing apparatus, substrate processing system, and substrate processing method |
Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi |
2020-05-26 |
|
| 10589398 |
Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program |
Yohei Eto |
2020-03-17 |
|
| 10556314 |
Head height adjustment device and substrate processing apparatus provided with head height adjustment device |
Suguru Sakugawa, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa, Keita Yagi +2 more |
2020-02-11 |
|
| 10475691 |
Substrate transfer hand |
Yasuyuki Motoshima, Yohei Eto |
2019-11-12 |
|
| 10438818 |
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus |
Junji Kunisawa, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more |
2019-10-08 |
|