| 11642753 |
Polishing-pad laminated structure, polishing-pad positioning instrument, and method of attaching a polishing pad to a polishing table |
Toshikazu Nomura, Masaki Kinoshita, Nobuyuki Takahashi, Takashi Kishi |
2023-05-09 |
| 11221239 |
Substrate processing apparatus and method of detecting indentation formed in substrate |
Zhongxin Wen, Nobuyuki Takahashi |
2022-01-11 |
| 10792784 |
Leak checking method, and computer-readable storage medium for performing the leak checking method |
Nobuyuki Takahashi, Toru Maruyama |
2020-10-06 |
| 10556314 |
Head height adjustment device and substrate processing apparatus provided with head height adjustment device |
Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa, Keita Yagi +2 more |
2020-02-11 |
| 9922852 |
Pressure calibration jig and substrate processing apparatus |
Nobuyuki Takahashi, Toru Maruyama |
2018-03-20 |
| 9662761 |
Polishing apparatus |
Hiroyuki Shinozaki, Nobuyuki Takahashi, Toru Maruyama, Osamu Nabeya |
2017-05-30 |
| 9370852 |
Pressure regulator and polishing apparatus having the pressure regulator |
Nobuyuki Takahashi, Toru Maruyama |
2016-06-21 |