Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11919048 | Method of cleaning an optical film-thickness measuring system | Nobuyuki Takahashi, Toru Maruyama, Taichi Yokoyama | 2024-03-05 |
| 11221239 | Substrate processing apparatus and method of detecting indentation formed in substrate | Nobuyuki Takahashi, Suguru Sakugawa | 2022-01-11 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Yoichi Shiokawa, Keita Yagi +2 more | 2020-02-11 |