Issued Patents All Time
Showing 25 most recent of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370578 | Substrate cleaning apparatus and substrate cleaning method | Fumitoshi Oikawa, Koichi Fukaya | 2025-07-29 |
| 12350787 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2025-07-08 |
| 12205831 | Cleaning apparatus and polishing apparatus | Tomoaki Fujimoto, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2025-01-21 |
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Fumitoshi Oikawa, Tomoaki Fujimoto, Koichi Fukaya | 2024-09-24 |
| 12094754 | Substrate supporting apparatus and method of controlling substrate supporting apparatus | Takuya Inoue | 2024-09-17 |
| 12053851 | Jig and installation method using same jig | Lien Yin Cheng, Akira Imamura, Junji Kunisawa | 2024-08-06 |
| 12046500 | Transport apparatus and substrate processing apparatus | Hao Yu, Takuya Inoue | 2024-07-23 |
| 11967508 | Damper control system and damper control method | Akira Imamura, Junji Kunisawa | 2024-04-23 |
| 11948827 | Substrate support mechanism, substrate cleaning device and substrate processing method | Hisajiro Nakano, Takuya Inoue | 2024-04-02 |
| 11948811 | Cleaning apparatus and polishing apparatus | Tomoaki Fujimoto, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2024-04-02 |
| 11894244 | Cleaning member mounting mechanism and substrate cleaning apparatus | Tomoaki Fujimoto, Takuya Inoue | 2024-02-06 |
| 11846536 | Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly | Naoki Toyomura | 2023-12-19 |
| 11766756 | Substrate support apparatus and substrate cleaning apparatus | — | 2023-09-26 |
| 11731240 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2023-08-22 |
| D992845 | Roller shaft for substrate cleaning | Tomoaki Fujimoto, Takuya Inoue | 2023-07-18 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2022-08-30 |
| 11195736 | Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus | Naoki Toyomura, Takuya Inoue | 2021-12-07 |
| 11103972 | Buff processing device and substrate processing device | Hideo Aizawa, Junji Kunisawa, Naoki Toyomura | 2021-08-31 |
| 11090692 | Cleaning liquid supplying system, substrate processing apparatus and substrate processing system | Akira Imamura, Takuya Inoue, Shozo TAKAHASHI | 2021-08-17 |
| 10898987 | Table for holding workpiece and processing apparatus with the table | Naoki Toyomura, Junji Kunisawa | 2021-01-26 |
| 10879086 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Kaoru Hamaura, Koji Maruyama | 2020-12-29 |
| 10847407 | Substrate holding apparatus | Naoki Toyomura | 2020-11-24 |
| 10575697 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Junji Kunisawa | 2020-03-03 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 10546764 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Junji Kunisawa, Shunsuke Matsuzawa | 2020-01-28 |