Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8225803 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +2 more | 2012-07-24 |
| 8002093 | Damper and vibration damping structure using the same | Masami Mochimaru, Sumio Kawaguchi, Akio Suzuki | 2011-08-23 |
| 7976362 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2011-07-12 |
| 7959977 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +2 more | 2011-06-14 |
| 7735451 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +2 more | 2010-06-15 |
| 7585205 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2009-09-08 |
| 7575636 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more | 2009-08-18 |
| 7565957 | Damper and vibration damping structure using the same | Masami Mochimaru, Sumio Kawaguchi, Akio Suzuki | 2009-07-28 |
| 7442257 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more | 2008-10-28 |
| 7235135 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Teruyuki Watanabe, Yasuyuki Motojima | 2007-06-26 |
| 7182187 | Damper and vibration damping structure using the same | Masami Mochimaru, Sumio Kawaguchi, Akio Suzuki | 2007-02-27 |
| 7087117 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more | 2006-08-08 |
| 6629883 | Polishing apparatus | Seiji Katsuoka, Masahiko Sekimoto, Naoki Noji, Kazuki Chiba, Kenji Fujimoto | 2003-10-07 |
| 6123313 | Seismic isolation apparatus | Susumu Otsuka, Kunio Hayakawa, Ikuo Shimoda, Kiyoharu Suzuki, Masami Mochimaru | 2000-09-26 |