Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Junji Kunisawa +1 more | 2019-12-10 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2019-11-26 |
| 10438817 | Cleaning apparatus and substrate processing apparatus | Haiyang Xu | 2019-10-08 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Masayoshi Imai, Koji Maeda, Teruaki HOMBO +1 more | 2019-10-08 |
| 10201888 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2019-02-12 |
| 10121692 | Substrate holding apparatus | Naoki Toyomura, Takuya Inoue | 2018-11-06 |
| 10032655 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Kaoru Hamaura, Koji Maruyama | 2018-07-24 |
| 9892953 | Substrate gripping apparatus | Naoki Matsuda, Junji Kunisawa, Manao Hoshina | 2018-02-13 |
| D795315 | Dresser disk | Kuniaki Yamaguchi, Naoki Toyomura, Takuya Inoue | 2017-08-22 |
| 9700988 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2017-07-11 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2017-06-27 |
| D790489 | Vacuum contact pad | Naoki Toyomura | 2017-06-27 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Toshio Yokoyama, Junji Kunisawa, Teruaki HOMBO, Naoki Toyomura | 2017-06-06 |
| 9558971 | Substrate holding apparatus and substrate cleaning apparatus | Takuya Inoue | 2017-01-31 |
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Toshio Yokoyama, Junji Kunisawa, Kenichi Suzuki, Hiroshi Sotozaki | 2016-12-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2016-06-07 |
| 9362129 | Polishing apparatus and polishing method | Kenichi Kobayashi, Teruaki HOMBO, Akira Imamura, Boyu DONG, Hiroyuki Shinozaki | 2016-06-07 |
| 9269605 | Substrate gripping apparatus | Naoki Matsuda, Junji Kunisawa, Manao Hoshina | 2016-02-23 |
| 9165799 | Substrate processing method and substrate processing unit | Xinming Wang, Kunimasa Matsushita | 2015-10-20 |
| D735429 | Roller shaft for substrate cleaning | Takuya Inoue | 2015-07-28 |
| D735430 | Roller shaft for substrate cleaning | Takuya Inoue | 2015-07-28 |
| D735431 | Roller shaft for substrate cleaning | Takuya Inoue | 2015-07-28 |
| 8833745 | Seismic isolation device and seismic isolation structure | Satoshi Fujita, Go Tanaka, Hideo Ozawa, Ikuo Shimoda | 2014-09-16 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2014-08-05 |
| 8484910 | Active dynamic vibration absorber | Ikuo Shimoda, Yuichi Iwasaki | 2013-07-16 |