Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12350787 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Takuya Inoue | 2025-07-08 |
| 11846536 | Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly | Mitsuru Miyazaki | 2023-12-19 |
| 11731240 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Takuya Inoue | 2023-08-22 |
| 11195736 | Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus | Mitsuru Miyazaki, Takuya Inoue | 2021-12-07 |
| 11103972 | Buff processing device and substrate processing device | Hideo Aizawa, Junji Kunisawa, Mitsuru Miyazaki | 2021-08-31 |
| 10898987 | Table for holding workpiece and processing apparatus with the table | Mitsuru Miyazaki, Junji Kunisawa | 2021-01-26 |
| 10847407 | Substrate holding apparatus | Mitsuru Miyazaki | 2020-11-24 |
| 10438820 | Substrate processing apparatus, discharge method, and program | Akira Imamura | 2019-10-08 |
| 10201888 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Takuya Inoue | 2019-02-12 |
| 10121692 | Substrate holding apparatus | Mitsuru Miyazaki, Takuya Inoue | 2018-11-06 |
| D795315 | Dresser disk | Mitsuru Miyazaki, Kuniaki Yamaguchi, Takuya Inoue | 2017-08-22 |
| 9700988 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Takuya Inoue | 2017-07-11 |
| D790489 | Vacuum contact pad | Mitsuru Miyazaki | 2017-06-27 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Toshio Yokoyama, Junji Kunisawa, Mitsuru Miyazaki, Teruaki HOMBO | 2017-06-06 |