Issued Patents All Time
Showing 1–25 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027402 | Substrate processing apparatus and substrate processing method | Tomonori Hirao, Takuya Tsushima, Hirotaka Ohashi | 2024-07-02 |
| 12020954 | Substrate processing apparatus | Hirotaka Ohashi, Mizuki Nagai, Ryu Miyamoto | 2024-06-25 |
| 11781233 | Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank | Junitsu Yamakawa, Chunhui Dou, Risa Kimura | 2023-10-10 |
| 11767606 | Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank | Junitsu Yamakawa, Chunhui Dou, Risa Kimura | 2023-09-26 |
| 11434580 | Plating apparatus | Tomonori Hirao, Gaku Yamasaki, Takahiro Abe | 2022-09-06 |
| 11332838 | Plating apparatus | Gaku Yamasaki, Tomonori Hirao | 2022-05-17 |
| 11230780 | Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank | Junitsu Yamakawa, Chunhui Dou, Risa Kimura | 2022-01-25 |
| 11098414 | Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method | Takashi Mitsuya, Ryuya Koizumi, Masashi Shimoyama, Kunio Oishi | 2021-08-24 |
| 11024520 | Substrate processing apparatus | Keiichi Kurashina | 2021-06-01 |
| 11015261 | Substrate holder and plating apparatus | Yoshitaka Mukaiyama, Junitsu Yamakawa, Takuya Tsushima, Tomonori Hirao, Sho Tamura +1 more | 2021-05-25 |
| 10665495 | Substrate attachment/detachment device, plating device, control device for a substrate attachment/detachment device, and storage medium that stores a program for causing a computer to execute a method of controlling a substrate attachment/detachment device | Yoshitaka Mukaiyama, Takuya Tsushima | 2020-05-26 |
| 10654017 | Supply-liquid producing apparatus and supply-liquid producing method | Suguru OZAWA, Yoichi Nakagawa, Muneto Takahashi, Tao Xu | 2020-05-19 |
| 10501862 | Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method | Takashi Mitsuya, Ryuya Koizumi, Masashi Shimoyama, Kunio Oishi | 2019-12-10 |
| 10468274 | Substrate processing apparatus | Keiichi Kurashina | 2019-11-05 |
| 10344729 | Engine including direct injector and port injector | Takehiro NISHIDONO, Junji Takai | 2019-07-09 |
| 10160013 | Rinsing bath and substrate cleaning method using such rinsing bath | Masahiko Sekimoto, Kenichi Kobayashi, Kenichi Akazawa | 2018-12-25 |
| 10141211 | Substrate processing apparatus and substrate transfer method | Masahiko Sekimoto, Kenichi Kobayashi, Kenichi Akazawa, Takashi Mitsuya, Keiichi Kurashina | 2018-11-27 |
| 9786532 | Substrate processing apparatus and method of transferring a substrate | Masahiko Sekimoto, Kenichi Kobayashi, Kenichi Akazawa, Takashi Mitsuya, Keiichi Kurashina | 2017-10-10 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Junji Kunisawa, Mitsuru Miyazaki, Teruaki HOMBO, Naoki Toyomura | 2017-06-06 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Hiroyuki Shinozaki, Kenji Shinkai, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono | 2017-05-30 |
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Junji Kunisawa, Mitsuru Miyazaki, Kenichi Suzuki, Hiroshi Sotozaki | 2016-12-27 |
| 8225803 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2012-07-24 |
| 7976362 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe +2 more | 2011-07-12 |
| 7959977 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2011-06-14 |
| 7735451 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2010-06-15 |