Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598017 | Method of plating | Shoichiro Ogata | 2023-03-07 |
| 11434580 | Plating apparatus | Tomonori Hirao, Takahiro Abe, Toshio Yokoyama | 2022-09-06 |
| 11332838 | Plating apparatus | Tomonori Hirao, Toshio Yokoyama | 2022-05-17 |
| 11332843 | Anode assembly | — | 2022-05-17 |
| 10937675 | Substrate processing apparatus, substrate processing apparatus control method, and storage medium storing program | — | 2021-03-02 |
| 10557211 | Substrate transporting apparatus, control apparatus for substrate transporting apparatus, displacement compensation method for substrate transporting apparatus, program for implementing method and recording medium that records program | Hirotaka Ohashi | 2020-02-11 |