Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027402 | Substrate processing apparatus and substrate processing method | Toshio Yokoyama, Takuya Tsushima, Hirotaka Ohashi | 2024-07-02 |
| 11658058 | Substrate holding apparatus | Takahiro Abe, Takuya Tsushima | 2023-05-23 |
| 11434580 | Plating apparatus | Gaku Yamasaki, Takahiro Abe, Toshio Yokoyama | 2022-09-06 |
| 11339496 | Plating apparatus | — | 2022-05-24 |
| 11332838 | Plating apparatus | Gaku Yamasaki, Toshio Yokoyama | 2022-05-17 |
| 11098413 | Plating apparatus and plating method | Shao Hua Chang | 2021-08-24 |
| 11015261 | Substrate holder and plating apparatus | Yoshitaka Mukaiyama, Toshio Yokoyama, Junitsu Yamakawa, Takuya Tsushima, Sho Tamura +1 more | 2021-05-25 |
| 10577706 | Plating apparatus | — | 2020-03-03 |
| 10294576 | Plating apparatus | — | 2019-05-21 |
| 9388504 | Plating apparatus and plating method | — | 2016-07-12 |