SC

Shao Hua Chang

EB Ebara: 21 patents #84 of 1,611Top 6%
Overall (All Time): #200,804 of 4,157,543Top 5%
21
Patents All Time

Issued Patents All Time

Showing 1–21 of 21 patents

Patent #TitleCo-InventorsDate
12270120 Plating apparatus and plating method Masaki Tomita, Masaya Seki, Masashi Shimoyama 2025-04-08
12247311 Plating apparatus and plating process method Yasuyuki Masuda, Masaya Seki 2025-03-11
12180606 Plating apparatus Masaya Seki, Masaki Tomita 2024-12-31
12152311 Wetting method for substrate and plating apparatus Masaya Seki 2024-11-26
12134833 Plating apparatus and cleaning method of contact member of plating apparatus Masaya Seki, Masaki Tomita 2024-11-05
12116687 Powder supply apparatus and plating system Jumpei Fujikata 2024-10-15
12077875 Air bubble removing method of plating apparatus and plating apparatus Kazuhito Tsuji, Masashi Shimoyama 2024-09-03
12054840 Plating apparatus, pre-wet process method, and cleaning process method Masaya Seki 2024-08-06
11906299 Plating apparatus and film thickness measuring method for substrate Masaya Seki, Masaki Tomita 2024-02-20
11891715 Paddle, processing apparatus having the paddle, and method of producing the paddle Yasuyuki Masuda, Yoshitaka Mukaiyama, Masashi Shimoyama, Jumpei Fujikata 2024-02-06
11846035 Plating apparatus and plating method Masaya Seki 2023-12-19
11725296 Plate, plating apparatus, and method of manufacturing plate Mitsuhiro Shamoto, Masashi Shimoyama 2023-08-15
11717796 Paddle, plating apparatus equipped with the paddle, and plating method Yasuyuki Masuda, Masashi Shimoyama, Jumpei Fujikata, Yohei Wakuda 2023-08-08
11603601 Plating device and resistor Mitsuhiro Shamoto, Masaki Tomita, Masashi Shimoyama 2023-03-14
11447883 Wet substrate processing device 2022-09-20
11359304 Powder supply apparatus and plating system Jumpei Fujikata 2022-06-14
11192151 Cleaning device, plating device including the same, and cleaning method Masaki Tomita 2021-12-07
11098413 Plating apparatus and plating method Tomonori Hirao 2021-08-24
10946351 Paddle, plating apparatus equipped with the paddle, and plating method Yasuyuki Masuda, Masashi Shimoyama, Jumpei Fujikata, Yohei Wakuda 2021-03-16
10914019 Plating apparatus and plating method Yasuyuki Masuda, Jumpei Fujikata, Masashi Shimoyama, Tsutomu Nakada 2021-02-09
10914020 Wave absorbing member attachable to paddle and plating apparatus including wave absorbing member Jumpei Fujikata 2021-02-09