| 11781233 |
Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank |
Chunhui Dou, Risa Kimura, Toshio Yokoyama |
2023-10-10 |
| 11767606 |
Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank |
Chunhui Dou, Risa Kimura, Toshio Yokoyama |
2023-09-26 |
| 11600514 |
Substrate holding device |
Masaki Tomita |
2023-03-07 |
| 11230780 |
Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank |
Chunhui Dou, Risa Kimura, Toshio Yokoyama |
2022-01-25 |
| 11015261 |
Substrate holder and plating apparatus |
Yoshitaka Mukaiyama, Toshio Yokoyama, Takuya Tsushima, Tomonori Hirao, Sho Tamura +1 more |
2021-05-25 |
| 10991605 |
Substrate processing device, method for controlling substrate processing device, and storage medium storing a program |
Takuya Tsushima |
2021-04-27 |
| 10781530 |
Cleaning apparatus, plating apparatus using the same, and cleaning method |
— |
2020-09-22 |
| 10163672 |
Substrate processing device, method for controlling substrate processing device, and storage medium storing programs |
Takuya Tsushima |
2018-12-25 |
| 7172683 |
Method of managing a plating liquid used in a plating apparatus |
Yasushi Isayama, Hiroyuki Ueyama, Hiroyuki Kaneko, Akihisa Hongo, Ryoichi Kimizuka +1 more |
2007-02-06 |
| RE39123 |
Plating apparatus |
Fumio Kuriyama, Hiroyuki Ueyama, Kenichi Suzuki, Atsushi Chono |
2006-06-13 |
| 6793794 |
Substrate plating apparatus and method |
Akihisa Hongo, Naoaki Ogure, Hiroyuki Ueyama, Mizuki Nagai, Kenichi Suzuki +3 more |
2004-09-21 |
| 6627066 |
Method of measuring the concentration of a leveler in a plating liquid |
Yasushi Isayama, Hiroyuki Ueyama, Hiroyuki Kaneko, Akihisa Hongo, Ryoichi Kimizuka +1 more |
2003-09-30 |
| 6379520 |
Plating apparatus |
Fumio Kuriyama, Hiroyuki Ueyama, Kenichi Suzuki, Atsushi Chono |
2002-04-30 |
| 6365017 |
Substrate plating device |
Akihisa Hongo, Naoaki Ogure, Hiroyuki Ueyama, Mizuki Nagai, Kenichi Suzuki +3 more |
2002-04-02 |