Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380559 | Carrier device, work processing apparatus, control method of carrier device and storage medium storing program | Yohei Eto, Junji Kunisawa, Keiji Kanazawa | 2022-07-05 |
| 11056359 | Cleaning apparatus and substrate processing apparatus | Junji Kunisawa | 2021-07-06 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki +1 more | 2019-10-08 |
| 10018545 | Substrate cleaning apparatus and method executed in the same | Junji Kunisawa | 2018-07-10 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Toshio Yokoyama, Junji Kunisawa, Mitsuru Miyazaki, Naoki Toyomura | 2017-06-06 |
| 9362129 | Polishing apparatus and polishing method | Mitsuru Miyazaki, Kenichi Kobayashi, Akira Imamura, Boyu DONG, Hiroyuki Shinozaki | 2016-06-07 |
| 9089881 | Method and apparatus for cleaning substrate | Xinming Wang, Fumitoshi Oikawa, Haruko Ono | 2015-07-28 |
| D710062 | Roller shaft for semiconductor cleaning | Tomoatsu Ishibashi, Fumitoshi Oikawa, Hideaki Tanaka | 2014-07-29 |