Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370578 | Substrate cleaning apparatus and substrate cleaning method | Koichi Fukaya, Mitsuru Miyazaki | 2025-07-29 |
| 12205831 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Koichi Fukaya, Takuya Inoue | 2025-01-21 |
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Tomoaki Fujimoto, Mitsuru Miyazaki, Koichi Fukaya | 2024-09-24 |
| 11948811 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Koichi Fukaya, Takuya Inoue | 2024-04-02 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Tomoatsu Ishibashi, Koichi Fukaya, Yasuyuki Motoshima +1 more | 2021-08-17 |
| 9089881 | Method and apparatus for cleaning substrate | Xinming Wang, Haruko Ono, Teruaki HOMBO | 2015-07-28 |
| D710062 | Roller shaft for semiconductor cleaning | Tomoatsu Ishibashi, Hideaki Tanaka, Teruaki HOMBO | 2014-07-29 |
| 8226771 | Substrate processing apparatus and substrate processing method | Shinji Kajita | 2012-07-24 |
| 6851152 | Substrate cleaning apparatus | Hiroshi Sotozaki | 2005-02-08 |
| 6842933 | Substrate cleaning apparatus and cleaning member | Koji Atoh | 2005-01-18 |
| 6651287 | Substrate cleaning apparatus and cleaning member | Koji Atoh | 2003-11-25 |
| 6412134 | Cleaning device and substrate cleaning apparatus | — | 2002-07-02 |
| 6248009 | Apparatus for cleaning substrate | Kenya Ito, Naoki Matsuda, Mitsuhiko Shirakashi, Koji Ato | 2001-06-19 |