Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205831 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2025-01-21 |
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Fumitoshi Oikawa, Mitsuru Miyazaki, Koichi Fukaya | 2024-09-24 |
| 11948811 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2024-04-02 |
| 11894244 | Cleaning member mounting mechanism and substrate cleaning apparatus | Mitsuru Miyazaki, Takuya Inoue | 2024-02-06 |
| D992845 | Roller shaft for substrate cleaning | Mitsuru Miyazaki, Takuya Inoue | 2023-07-18 |
| 11524322 | Jig for attaching and detaching cleaning member | Shuichi Suemasa, Tomoatsu Ishibashi | 2022-12-13 |