Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837482 | Substrate holding and rotation mechanism and substrate processing apparatus | — | 2023-12-05 |
| 11524322 | Jig for attaching and detaching cleaning member | Tomoaki Fujimoto, Tomoatsu Ishibashi | 2022-12-13 |
| 11004701 | Break-in apparatus, break-in system and storage media | — | 2021-05-11 |
| 10751761 | Self-cleaning device and substrate processing apparatus | — | 2020-08-25 |
| 9908212 | Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine | Hiroyuki Shinozaki, Yutaka Kobayashi | 2018-03-06 |