Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9089881 | Method and apparatus for cleaning substrate | Xinming Wang, Fumitoshi Oikawa, Teruaki HOMBO | 2015-07-28 |
| 7578887 | Apparatus for and method of processing substrate | Shinji Kajita, Ichiro Katakabe, Yuki Inoue, Sachiko Takeda | 2009-08-25 |
| 7309449 | Substrate processing method | Sachiko Takeda, Ichiro Katakabe | 2007-12-18 |