Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710624 | Sputtering method | Bingliang GUO, Huaichao MA, Andong Sun, Henan Zhang, Lu Zhang +1 more | 2023-07-25 |
| 11315768 | Loading apparatus and physical vapor deposition apparatus | Xuewei Wu, Tong Wang, Jun Zhang, Bingliang GUO, Jun Wang +8 more | 2022-04-26 |
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Jun Zhang, Jinrong Zhao, Xuewei Wu, Bingliang GUO, Baogang Xu +4 more | 2021-04-20 |
| 10937672 | Heating device and heating chamber | Jun Zhang, Xuewei Wu, Baogang Xu, Henan Zhang, Bingliang GUO +2 more | 2021-03-02 |
| 10640862 | Method for forming film and method for forming aluminum nitride film | Jun Wang, Bingliang GUO, Yujie GENG, Huaichao MA | 2020-05-05 |
| 10643843 | Film forming method and aluminum nitride film forming method for semiconductor apparatus | Jun Wang, Bingliang GUO, Yujie GENG, Huaichao MA | 2020-05-05 |
| 9362129 | Polishing apparatus and polishing method | Mitsuru Miyazaki, Kenichi Kobayashi, Teruaki HOMBO, Akira Imamura, Hiroyuki Shinozaki | 2016-06-07 |