Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315768 | Loading apparatus and physical vapor deposition apparatus | Xuewei Wu, Tong Wang, Boyu DONG, Jun Zhang, Bingliang GUO +8 more | 2022-04-26 |
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Jun Zhang, Boyu DONG, Jinrong Zhao, Xuewei Wu, Bingliang GUO +4 more | 2021-04-20 |
| 10937672 | Heating device and heating chamber | Jun Zhang, Xuewei Wu, Boyu DONG, Henan Zhang, Bingliang GUO +2 more | 2021-03-02 |