Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710624 | Sputtering method | Bingliang GUO, Andong Sun, Henan Zhang, Boyu DONG, Lu Zhang +1 more | 2023-07-25 |
| 11315768 | Loading apparatus and physical vapor deposition apparatus | Xuewei Wu, Tong Wang, Boyu DONG, Jun Zhang, Bingliang GUO +8 more | 2022-04-26 |
| 10640862 | Method for forming film and method for forming aluminum nitride film | Jun Wang, Boyu DONG, Bingliang GUO, Yujie GENG | 2020-05-05 |
| 10643843 | Film forming method and aluminum nitride film forming method for semiconductor apparatus | Jun Wang, Boyu DONG, Bingliang GUO, Yujie GENG | 2020-05-05 |