Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848216 | Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly | Takayuki Kajikawa, Takeshi Iizumi | 2023-12-19 |
| 11495475 | Method of cleaning a substrate | Koji Maeda, Hiroshi Shimomoto, Hisajiro Nakano, Yoichi Shiokawa | 2022-11-08 |
| 10985037 | Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus | Daisuke Minoshima | 2021-04-20 |
| 10607862 | Substrate cleaning apparatus | — | 2020-03-31 |
| 10500691 | Substrate processing apparatus and substrate processing method | Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Junji Kunisawa, Takeshi Iizumi +1 more | 2019-12-10 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more | 2019-10-08 |
| 10229841 | Wafer drying apparatus and wafer drying method | Satomi Hamada | 2019-03-12 |
| 9666455 | Substrate cleaning apparatus | — | 2017-05-30 |
| 7479205 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2009-01-20 |
| 7428907 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2008-09-30 |
| 7267130 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2007-09-11 |
| 6951221 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2005-10-04 |