Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12343770 | Cleaning device and cleaning method | Yuki Tanaka, Takayuki Kajikawa | 2025-07-01 |
| 11848216 | Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly | Takayuki Kajikawa, Masayoshi Imai | 2023-12-19 |
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Junji Kunisawa +1 more | 2019-12-10 |
| 8951813 | Method of polishing a substrate having a film on a surface of the substrate for semiconductor manufacturing | Katsuhide Watanabe, Yoichi Kobayashi | 2015-02-10 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method | Osamu Nabeya, Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Nobuyuki Takada +7 more | 2009-12-29 |
| 7578920 | Electrolytic processing method | Ikutaro Noji, Hozumi Yasuda, Kazuto Hirokawa, Itsuki Kobata | 2009-08-25 |
| 7476303 | Electrolytic processing apparatus and electrolytic processing method | Hozumi Yasuda, Ikutaro Noji, Kazuto Hirokawa, Itsuki Kobata | 2009-01-13 |