Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12318881 | Substrate polishing apparatus and substrate polishing method | Takuya Fujimoto | 2025-06-03 |
| 12211733 | Substrate processing apparatus and substrate processing method | Hozumi Yasuda | 2025-01-28 |
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura +4 more | 2024-06-25 |
| 11911872 | Substrate processing apparatus and substrate processing method | Hozumi Yasuda | 2024-02-27 |
| 11735457 | Substrate processing apparatus and substrate processing method | Hozumi Yasuda | 2023-08-22 |
| 11633828 | Substrate polishing system, substrate polishing method and substrate polishing apparatus | Yuta Suzuki, Taro Takahashi, Akihiko Ogawa, Shigeyuki Furuya, Yuji Yagi +1 more | 2023-04-25 |
| 8657648 | Processing apparatus having four processing units | Satoshi Yamanaka, Toshiyasu Rikiishi | 2014-02-25 |
| 7850509 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2010-12-14 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method | Osamu Nabeya, Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Takeshi Iizumi +7 more | 2009-12-29 |
| 7632378 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2009-12-15 |
| 7491117 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2009-02-17 |
| 7156725 | Substrate polishing machine | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2007-01-02 |
| 7083507 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2006-08-01 |
| 6899604 | Dressing apparatus and polishing apparatus | Tetsuji Togawa, Ikutaro Noji, Shunichiro Kojima | 2005-05-31 |
| 6878044 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2005-04-12 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2005-02-08 |
| 6682408 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2004-01-27 |
| 6609962 | Dressing apparatus and polishing apparatus | Satoshi Wakabayashi, Kuniaki Yamaguchi, Tetsuji Togawa, Osamu Nabeya | 2003-08-26 |
| 6602119 | Dressing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi, Satoshi Wakabayashi | 2003-08-05 |
| 6558226 | Polishing apparatus | Tetsuji Togawa | 2003-05-06 |
| 6447385 | Polishing apparatus | Tetsuji Togawa | 2002-09-10 |
| 6413154 | Polishing apparatus | Tetsuji Togawa, Takeshi Sakurai, Shoichi Kodama, Hiromi Yajima | 2002-07-02 |
| 6379229 | Polishing apparatus | Satoshi Wakabayashi, Tetsuji Togawa, Kuniaki Yamaguchi | 2002-04-30 |
| 6358128 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2002-03-19 |
| 6354918 | Apparatus and method for polishing workpiece | Tetsuji Togawa, Seiji Katsuoka, Kenichi Shigeta | 2002-03-12 |