Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354922 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2002-03-12 |
| 6319105 | Polishing apparatus | Tetsuji Togawa, Takeshi Sakurai | 2001-11-20 |
| 6312312 | Polishing apparatus | Tetsuji Togawa, Seiji Katsuoka, Hiroyuki Osawa | 2001-11-06 |
| 6241578 | Carrier device in polishing apparatus and method for controlling carrier device | Tetsuji Togawa | 2001-06-05 |
| 6042455 | Polishing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi | 2000-03-28 |