Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358098 | Liquid feeder and polishing apparatus | Masayuki Tamura, Kenji Shinkai, Soichi Isobe, Yusuke MOCHIDA | 2025-07-15 |
| 12350787 | Substrate processing apparatus | Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2025-07-08 |
| 11731240 | Substrate processing apparatus | Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2023-08-22 |
| 11541502 | Substrate processing apparatus | Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Kenji Shinkai, Hidetatsu Isokawa +5 more | 2023-01-03 |
| 11192216 | Polishing method and polishing apparatus | Hiromitsu Watanabe, Itsuki Kobata, Yutaka Wada | 2021-12-07 |
| 10818531 | Substrate transport system, substrate processing apparatus, hand position adjustment method | Haiyang Xu, Koji Maeda, Mitsuhiko Inaba | 2020-10-27 |
| 10792782 | Polishing-amount simulation method for buffing, and buffing apparatus | Itsuki Kobata, Toshio Mizuno | 2020-10-06 |
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima, Kenji Shinkai +5 more | 2020-06-23 |
| 10618140 | Substrate processing system and substrate processing method | — | 2020-04-14 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Hiroshi Aono, Tetsuya Yashima, Hidetatsu Isokawa +6 more | 2020-02-25 |
| 10201888 | Substrate processing apparatus | Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2019-02-12 |
| 10183374 | Buffing apparatus, and substrate processing apparatus | Toshio Mizuno, Itsuki Kobata | 2019-01-22 |
| 10131030 | Buffing apparatus and substrate processing apparatus | Itsuki Kobata, Toshio Mizuno | 2018-11-20 |
| D795315 | Dresser disk | Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2017-08-22 |
| 9700988 | Substrate processing apparatus | Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2017-07-11 |
| 9156130 | Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus | Takahiro SHIMANO, Mutsumi Tanikawa, Hisanori Matsuo, Katsuhide Watanabe | 2015-10-13 |
| 9108292 | Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus | Takahiro SHIMANO, Mutsumi Tanikawa, Hisanori Matsuo, Katsuhide Watanabe | 2015-08-18 |
| 9067296 | Polishing method | Katsutoshi Ono, Yu Ishii, Hisanori Matsuo | 2015-06-30 |
| 8592313 | Polishing method and polishing apparatus | Tsuneo Torikoshi | 2013-11-26 |
| 8332064 | Polishing method and polishing apparatus, and program for controlling polishing apparatus | Tsuneo Torikoshi | 2012-12-11 |
| 7989348 | Polishing method and polishing apparatus | Tsuneo Torikoshi | 2011-08-02 |
| 6609962 | Dressing apparatus and polishing apparatus | Satoshi Wakabayashi, Tetsuji Togawa, Nobuyuki Takada, Osamu Nabeya | 2003-08-26 |
| 6602119 | Dressing apparatus | Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi | 2003-08-05 |
| 6428400 | Drainage structure in polishing plant | Tetsuji Togawa | 2002-08-06 |
| 6409582 | Polishing apparatus | Tetsuji Togawa, Shunichiro Kojima, Toyomi Nishi | 2002-06-25 |