Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379229 | Polishing apparatus | Satoshi Wakabayashi, Tetsuji Togawa, Nobuyuki Takada | 2002-04-30 |
| 6338669 | Polishing device | Tetsuji Togawa | 2002-01-15 |
| 6227954 | Polishing apparatus | Tetsuji Togawa, Kunihiko Sakurai, Hiromi Yajima | 2001-05-08 |
| 6116986 | Drainage structure in polishing plant and method of polishing using structure | Tetsuji Togawa | 2000-09-12 |
| 6050884 | Polishing apparatus | Tetsuji Togawa, Shunichiro Kojima, Toyomi Nishi | 2000-04-18 |
| 6042455 | Polishing apparatus | Tetsuji Togawa, Nobuyuki Takada | 2000-03-28 |
| 5961380 | Robotic transport apparatus | Tetsuji Togawa, Kunihiko Sakurai | 1999-10-05 |
| 5944941 | Turning-over machine and polishing apparatus | Tetsuji Togawa | 1999-08-31 |
| 5893794 | Polishing apparatus having robotic transport apparatus | Tetsuji Togawa, Kunihiko Sakurai | 1999-04-13 |