Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9533395 | Method and apparatus for conditioning a polishing pad | Takahiro SHIMANO | 2017-01-03 |
| 9469013 | Method and apparatus for conditioning a polishing pad | Takahiro SHIMANO | 2016-10-18 |
| 9156130 | Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus | Takahiro SHIMANO, Hisanori Matsuo, Kuniaki Yamaguchi, Katsuhide Watanabe | 2015-10-13 |
| 9108292 | Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus | Takahiro SHIMANO, Hisanori Matsuo, Kuniaki Yamaguchi, Katsuhide Watanabe | 2015-08-18 |
| 6508695 | Pure water reusing system | Mitsunori Komatsu, Kiyotaka Kawashima, Hiroshi Shimomoto, Katsuya Okumura | 2003-01-21 |
| 6358125 | Polishing liquid supply apparatus | Kiyotaka Kawashima, Hiroshi Shimomoto, Keiko Chono | 2002-03-19 |
| 6338671 | Apparatus for supplying polishing liquid | Kiyotaka Kawashima, Mitsunori Komatsu, Fujihiko Toyomasu | 2002-01-15 |
| 6280300 | Filter apparatus | Mitsunori Komatsu, Kiyotaka Kawashima | 2001-08-28 |