Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12208428 | Liquid supplying device and method for draining liquid thereof | Junji Kunisawa | 2025-01-28 |
| 12140980 | Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate | Junji Kunisawa | 2024-11-12 |
| 12042901 | Cleaning liquid supply device, cleaning unit, and storage medium storing program | Haiyang Xu | 2024-07-23 |
| 11890652 | Cleaning chemical liquid supply device and cleaning chemical liquid supply method | Junji Kunisawa | 2024-02-06 |
| 11358253 | Cleaning liquid supply device, cleaning unit, and storage medium storing program | Haiyang Xu | 2022-06-14 |
| 10926301 | Liquid supplying device and liquid supplying method | Junji Kunisawa | 2021-02-23 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki +1 more | 2019-10-08 |
| 10373845 | Substrate cleaning apparatus and substrate cleaning method | Toru Maruyama, Mitsunori Komatsu | 2019-08-06 |
| 10343192 | Liquid supplying device and liquid supplying method | Junji Kunisawa | 2019-07-09 |
| 10340159 | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit | Toru Maruyama, Junji Kunisawa | 2019-07-02 |
| 6802762 | Method for supplying slurry to polishing apparatus | Takashi Tanaka, Takashi Tsuzuki | 2004-10-12 |
| 6722953 | Abrasive liquid feed apparatus, method for feeding additive to abrasive liquid feed apparatus, and polishing apparatus | Takashi Tanaka, Takashi Tsuzuki | 2004-04-20 |
| 6338671 | Apparatus for supplying polishing liquid | Kiyotaka Kawashima, Mitsunori Komatsu, Mutsumi Tanikawa | 2002-01-15 |