Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179312 | Apparatus for polishing, processing system, and method of polishing | Takuya MORIURA, Hiroshi Sotozaki, Masayoshi Ito, Itsuki Kobata, Hisanori Matsuo +1 more | 2024-12-31 |
| 11980998 | Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid | Itsuki Kobata, Takashi Yamazaki, Ryuichi Kosuge | 2024-05-14 |
| 11839948 | Polishing apparatus | Takashi Yamazaki, Itsuki Kobata, Ryuichi Kosuge | 2023-12-12 |
| 11642755 | Apparatus for polishing and method for polishing | Pohan Chen, Hiroshi Sotozaki | 2023-05-09 |
| 11612983 | Polishing apparatus and polishing method | Hiroshi Sotozaki | 2023-03-28 |
| 11472002 | Substrate polishing apparatus | Hiroyuki Shinozaki, Hiroshi Aono, Kenji Shinkai, Hideo Aizawa | 2022-10-18 |
| 11465256 | Apparatus for polishing and method for polishing | Hiroshi Sotozaki, Pohan Chen | 2022-10-11 |
| 11007621 | Polishing apparatus and polishing method | Hiroshi Sotozaki | 2021-05-18 |
| 10987776 | Calibration method and non-transitory computer-readable storage medium storing a program of calibration | Pohan Chen, Kenichi Suzuki, Hiroshi Sotozaki | 2021-04-27 |
| 10730162 | Turntable cloth peeling jig | Hiroshi Sotozaki, Kenichiro Saito | 2020-08-04 |
| 10576604 | Substrate polishing apparatus | Hiroyuki Shinozaki, Hiroshi Aono, Kenji Shinkai, Hideo Aizawa | 2020-03-03 |
| 9764446 | Rotary joint and polishing apparatus | Hideo Aizawa, Masao Umemoto, Ryuichi Kosuge | 2017-09-19 |
| 9724798 | Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus | Kenji Shinkai, Hideo Aizawa, Hiroshi Aono | 2017-08-08 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Hiroyuki Shinozaki, Kenji Shinkai, Hideo Aizawa, Hiroshi Aono, Toshio Yokoyama | 2017-05-30 |
| 9530704 | Polishing apparatus and wear detection method | Ryuichi Kosuge | 2016-12-27 |
| 9522453 | Polishing apparatus | Hideo Aizawa, Masao Umemoto, Ryuichi Kosuge | 2016-12-20 |
| 9475167 | Polishing apparatus having temperature regulator for polishing pad | Toru Maruyama, Yasuyuki Motoshima | 2016-10-25 |
| 9409277 | Polishing apparatus and polishing method | Masao Umemoto, Hideo Aizawa, Ryuichi Kosuge, Masaaki Eriguchi | 2016-08-09 |
| 9216442 | Gas-liquid separator and polishing apparatus | Hideo Aizawa, Masao Umemoto | 2015-12-22 |
| 9174324 | Polishing apparatus with polishing head cover | Masao Umemoto, Ryuichi Kosuge, Hideo Aizawa | 2015-11-03 |
| 9144878 | Polishing apparatus and wear detection method | Ryuichi Kosuge | 2015-09-29 |
| 9028297 | Polishing apparatus | Ryuichi Kosuge | 2015-05-12 |
| 8845391 | Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus | Yasuyuki Motoshima, Toru Maruyama, Katsutoshi Ono, Yoichi Shiokawa | 2014-09-30 |
| 8118640 | Wafer transferring apparatus, polishing apparatus, and wafer receiving method | Nobuyuki Takahashi, Takuji Kobayashi, Hiroomi Torii | 2012-02-21 |
| 6969305 | Polishing apparatus | Norio Kimura, Tomohiko Akatsuka, Tatsuya Sasaki | 2005-11-29 |