Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11642755 | Apparatus for polishing and method for polishing | Hiroshi Sotozaki, Tadakazu Sone | 2023-05-09 |
| 11465256 | Apparatus for polishing and method for polishing | Hiroshi Sotozaki, Tadakazu Sone | 2022-10-11 |
| 10987776 | Calibration method and non-transitory computer-readable storage medium storing a program of calibration | Tadakazu Sone, Kenichi Suzuki, Hiroshi Sotozaki | 2021-04-27 |
| 10910791 | Low speckle laser array and image display thereof | Babu Dayal Padullaparthi, Liqin Qiu, Jiarui FEI | 2021-02-02 |