Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911806 | Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium | Masumi Nishijima, Hiroshi Ishikawa | 2024-02-27 |
| 11267097 | Non-transitory computer-readable storage medium storing a program of stretching operation of elastic membrane, method of stretching operation of elastic membrane, and polishing apparatus | Kazuya OTSU, Koichi Takeda | 2022-03-08 |
| 9737973 | Substrate processing apparatus | Mitsunori Sugiyama | 2017-08-22 |
| 9165799 | Substrate processing method and substrate processing unit | Xinming Wang, Mitsuru Miyazaki | 2015-10-20 |