KO

Kazuya OTSU

EB Ebara: 1 patents #1,014 of 1,611Top 65%
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Patent #TitleCo-InventorsDate
11267097 Non-transitory computer-readable storage medium storing a program of stretching operation of elastic membrane, method of stretching operation of elastic membrane, and polishing apparatus Koichi Takeda, Kunimasa Matsushita 2022-03-08