Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667007 | Polishing apparatus and polishing method | Taro Takahashi, Yoichi Kobayashi | 2023-06-06 |
| 10890899 | Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus | Ryuichiro Mitani, Akihiko Ogawa | 2021-01-12 |
| 10317890 | Failure detection apparatus for substrate processing apparatus, and substrate processing apparatus | Masafumi Inoue | 2019-06-11 |
| 9904280 | Substrate treatment apparatus and control device | — | 2018-02-27 |
| 9737973 | Substrate processing apparatus | Kunimasa Matsushita | 2017-08-22 |
| 8165710 | Polishing method, polishing apparatus, and program for controlling polishing apparatus | Tsuneo Torikoshi | 2012-04-24 |