Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10890899 | Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus | Mitsunori Sugiyama, Akihiko Ogawa | 2021-01-12 |
| 10207390 | Processing end point detection method, polishing method, and polishing apparatus | Noburu Shimizu, Shinro Ohta, Koji Maruyama, Yoichi Kobayashi, Shunsuke Nakai +1 more | 2019-02-19 |
| 8554356 | Processing end point detection method, polishing method, and polishing apparatus | Noburu Shimizu, Shinro Ohta, Koji Maruyama, Yoichi Kobayashi, Shunsuke Nakai +1 more | 2013-10-08 |
| 7300332 | Polished state monitoring apparatus and polishing apparatus using the same | Yoichi Kobayashi | 2007-11-27 |