Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10207390 | Processing end point detection method, polishing method, and polishing apparatus | Noburu Shimizu, Koji Maruyama, Yoichi Kobayashi, Ryuichiro Mitani, Shunsuke Nakai +1 more | 2019-02-19 |
| 8696924 | Polishing apparatus and polishing method | Mitsuo Tada, Taro Takahashi, Motohiro Niijima, Atsushi Shigeta | 2014-04-15 |
| 8554356 | Processing end point detection method, polishing method, and polishing apparatus | Noburu Shimizu, Koji Maruyama, Yoichi Kobayashi, Ryuichiro Mitani, Shunsuke Nakai +1 more | 2013-10-08 |
| 7101257 | Substrate polishing apparatus | Kazuto Hirokawa, Yoichi Kobayashi, Shunsuke Nakai, Yasuo Tsukuda | 2006-09-05 |
| 7081044 | Polishing apparatus and polishing pad | Kazuo Shimizu | 2006-07-25 |
| 7021991 | Polishing apparatus | Kazuo Shimizu, Akihiro Tsukada | 2006-04-04 |