Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8225803 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +2 more | 2012-07-24 |
| 7959977 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +2 more | 2011-06-14 |
| 7735451 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +2 more | 2010-06-15 |
| 7235135 | Substrate processing apparatus and substrate processing method | Mitsuru Miyazaki, Seiji Katsuoka, Teruyuki Watanabe | 2007-06-26 |